S. M. M. Shafiei, M. Divandari, S. M. A. Boutorabi, Naghizadeh,
Volume 12, Issue 2 (6-2015)
Abstract
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour
deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness
gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure
and phase of the films were investigated by X-ray diffraction. Atomic force microscopy and scanning electron
microscopy were employed to observe the morphology and structure of the films. The TiCN layer exhibited a columnar
structure. The adhesion force between the film and the tool steel substrate was 30.8 MPa for TiN/TiCN and 25.4 MPa
for PN/TiCN film determined by pull off tests. The hardness of TiN/TiCN film was 12.75 GPa while it was 5.4 GPa for
PN/TiCN film, respectively. The improvement of the adhesion in TiN/TiCN was attributed to a less gradient hardness
configuration. In addition, the mean friction coefficients of the films were about 0.2 for TiN/TiCN and 0.3 for PN/TiCN
film determined by nanoindentation tests.
