In this research, praseodymium (Pr) doped titanium oxide was deposited onto a glass substrate by nebulizer spray pyrolysis technique. The rare earth-doped thin film was subjected to studies on structural, morphological, optical, and gas sensing properties. The structural properties of the deposited thin films exhibit varied texture along with (101) direction. The grain size of the thin film varies with various mole percentages of doped TiO2 thin films. As various doping concentrations increase, the prepared thin films show different optical properties like band gap, extension coefficient, refractive index, and dielectric constant. Fourier transform infrared (FTIR) results revealed that the reflectance spectra conformed to the existence of functional groups and chemical bonding. Gas sensing studies were carried out for undoped and Pr-doped TiO2 films. The sensor was exposed to ethanol gas. The response of a TiO2 thin film at different ethanol concentrations and different operation temperatures was studied. The gas sensitivity of ethanol gas was measured when the fast response of the film with 0.004M Pr-doped TiO2 thin film showed a response time of 99 s and recovery time of 41 s, as well as the resistance falling to 0.6x106Ω. The sensor operated at maximum effectiveness at an optimum temperature of 200°C.
